Silicon-based horizontal nanoplasmonic slot waveguides for on-chip integration
نویسندگان
چکیده
منابع مشابه
Horizontal Slot Waveguides for Silicon Photonics Back-End Integration
This thesis presents the development of integrated silicon photonic devices. These devices are compatible with the present and near future CMOS technology. High-k horizontal grating couplers and waveguides are proposed. This work consists of simulations and device design, as well as the layout for the fabrication process, device fabrication, process development, characterization instrument deve...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2011
ISSN: 1094-4087
DOI: 10.1364/oe.19.008888